25. Reconfigurable phase-change photomask for grayscale photolithography

Q. Wang, G. H. Yuan, K.S. Kiang, K. Sun, B. Gholipour,E. T. F. Rogers, K. Huang, S. S. Ang, N. I. Zheludev and J. H. Teng, s

25. Reconfigurable phase-change photomask for grayscale photolithography